Microelectromechanical systems, aka MEMS, are tiny mechanical devices that can be actuated with electrical voltage or alternatively mechanical motion can generate electrical signal.
These devices are typically made out of Silicon with a conventional microfabrication techniques and can be used in various applications. Typical examples are microphoness, accelerometers, and ultrasonic devices for medical imaging. In addition, MEMS resonators can be used as reference for timing and frequency control application to provide accurate time or frequency for telecommunication - this is our groundbreaking MEMS technology developed at Kyocera.
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